JPH084564Y2 - 光学式変位測定器 - Google Patents

光学式変位測定器

Info

Publication number
JPH084564Y2
JPH084564Y2 JP12730589U JP12730589U JPH084564Y2 JP H084564 Y2 JPH084564 Y2 JP H084564Y2 JP 12730589 U JP12730589 U JP 12730589U JP 12730589 U JP12730589 U JP 12730589U JP H084564 Y2 JPH084564 Y2 JP H084564Y2
Authority
JP
Japan
Prior art keywords
condensing lenses
photodiode
focus
photodiodes
displacement measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP12730589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0365909U (en]
Inventor
由美子 又野
健雄 田名網
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP12730589U priority Critical patent/JPH084564Y2/ja
Publication of JPH0365909U publication Critical patent/JPH0365909U/ja
Application granted granted Critical
Publication of JPH084564Y2 publication Critical patent/JPH084564Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP12730589U 1989-10-31 1989-10-31 光学式変位測定器 Expired - Fee Related JPH084564Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12730589U JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12730589U JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Publications (2)

Publication Number Publication Date
JPH0365909U JPH0365909U (en]) 1991-06-26
JPH084564Y2 true JPH084564Y2 (ja) 1996-02-07

Family

ID=31675065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12730589U Expired - Fee Related JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Country Status (1)

Country Link
JP (1) JPH084564Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233336C2 (de) * 1992-10-05 2001-08-23 Zeiss Carl Verfahren und Vorrichtung zur Detektion von Fokusablagen

Also Published As

Publication number Publication date
JPH0365909U (en]) 1991-06-26

Similar Documents

Publication Publication Date Title
JP2913984B2 (ja) 傾斜角測定装置
JPH0670592B2 (ja) コンパクト連続波波面センサー
JPH084564Y2 (ja) 光学式変位測定器
JPS6161178B2 (en])
JPS59163517A (ja) 光学式スケ−ル読取装置
JPH07294231A (ja) 光学式表面粗度計
JP3143514B2 (ja) 面位置検出装置及びこれを有する露光装置
JPH0238808A (ja) 光センサ
JPH07311009A (ja) 位置検出装置
JPH01303632A (ja) 光デイスク装置
JP2891715B2 (ja) 縞走査型干渉測定装置
JP2594105Y2 (ja) 光学式変位計
JPH0512753Y2 (en])
JP3204726B2 (ja) エッジセンサ
JPS61133813A (ja) 面形状測定装置
RU1796901C (ru) Устройство дл бесконтактного измерени профил деталей
JPS6283604A (ja) 変位変換器
JPH0428014Y2 (en])
JPH04174336A (ja) ポリゴンミラー測定器
JPS63172905A (ja) 回折光の分離方法および分離装置
JPS63100620A (ja) 光学式ピツクアツプ装置
KR880004297Y1 (ko) 집속제어용 광학 감지기
JPS6283612A (ja) 変位変換器
JPS62154338A (ja) 光学ヘツド
JPH02300618A (ja) ３次元形状測定装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees